Linear Piezo Stage EPSL Series
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Product Introduction
The linear piezo stage uses piezoelectric ceramics as the actuating element, achieving a minimum step size at the sub-nanometer level over a range of hundreds of millimeters — solving the problem of traditional nano stages’ short travel and micrometer motorized stages’ lower precision. Widely used in research, semiconductor, advanced manufacturing, biomedical, optics and communications industries. The piezo-driven stage requires no lubrication, is vacuum-compatible, has both stepping and scanning modes, and achieves sub-nanometer resolution positioning over a macroscopic travel range.
Product Features
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Technical Specifications
| Model | EPSL15A | EPSL23A | EPSL37A | EPSL92A |
|---|---|---|---|---|
| Dimensions (L×W×H) | 33.4×20.0x12.8（mm） | 43.4×20.0x12.8（mm） | 53.4×20.0x12.8（mm） | 123.0×28.0x15.5（mm） |
| Tabletop Flatness | 10（um） | 10（um） | 10（um） | 10（um） |
| Total Mass | 64（g） | 72（g） | 91（g） | 219（g） |
| Body Material | Aluminum Alloy | Aluminum Alloy | Aluminum Alloy | Aluminum Alloy |
| Drive | PZT Piezo Ceramic | PZT Piezo Ceramic | PZT Piezo Ceramic | PZT Piezo Ceramic |
| Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire |
| Motion Range | ±7.5mm | ±11.5mm | ±18.5mm | ±46mm |
| Max Speed | 2~3mm/s | 2~3mm/s | 2~3mm/s | 2~3mm/s |
| Fine Stepping | 1nm | 1nm | 1nm | 1nm |
| Fine Adjustment Range | 2500nm | 2500nm | 2500nm | 2500nm |
| Repeat Positioning Accuracy | ±150 nm (typical), high-precision ±50 nm | ±150 nm (typical), high-precision ±50 nm | ±150 nm (typical), high-precision ±50 nm | ±200 nm (typical), high-precision ±75 nm |
| Sensor Resolution | 1, 4, 20, 100, 500, 1000nm | 1, 4, 20, 100, 500, 1000nm | 1, 4, 20, 100, 500, 1000nm | 1, 4, 20, 100, 500, 1000nm |
| Position Sensor | Grating | Grating | Grating | Grating |
| Mounting Orientation | Horizontal Mount | Horizontal Mount | Horizontal Mount | Horizontal Mount |
| Load in Vertical Motion Direction | 20N | 20N | 20N | 20N |
| Load along Motion Direction | 2N | 2N | 2N | 2N |
| Operating Temperature | -20~80℃ | -20~80℃ | -20~80℃ | -20~80℃ |
| Operating Humidity | Relative humidity 40-60% | Relative humidity 40-60% | Relative humidity 40-60% | Relative humidity 40-60% |
| Vacuum Compatibility | Vacuum version available | Vacuum version available | Vacuum version available | Vacuum version available |
| Control Type | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop |
| Max Drive Voltage | 80V | 80V | 80V | 80V |
| Mounting Requirements | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm |
