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3-Axis Probe Station
4-Axis Probe Station

probe station

Adopting a high-precision slide table with high adjustment accuracy, the magnetic switch base is used for easy fixation and multi-dimensional adjustment, making it convenient for testing. It is compact and exquisite, saving space in the semiconductor industry, optoelectronic industry, integrated circuit, and packaging testing.

Product Introduction

The probe station is used to fix probes and perform high-precision, high-stability probe movement. It mainly consists of an adjustable high-precision slide and a magnetic base, allowing the slide and product position to be adjusted freely as needed.

Product Features

  • Uses a high-precision slide with high adjustment accuracy.
  • Magnetic switch base for easy fixing and pick-and-place.
  • Multi-dimensional adjustment for convenient testing.
  • Compact and delicate, saving space.

Application

Testing in the semiconductor industry, optoelectronics industry, integrated circuits and packaging.

Technical Parameters

Base size X/Y/Z axis travel range X/Y/Z axis adjustment accuracy Arc swing stage adjustment range (4-axis)
65 × 65 mm ±6.5 mm 1 μm ±6°

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