Linear Piezo Stage EPSK Series
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Product Introduction
The linear piezo stage uses piezoelectric ceramics as the actuating element, achieving a minimum step size at the sub-nanometer level over a range of hundreds of millimeters — solving the problem of traditional nano stages’ short travel and micrometer motorized stages’ lower precision. It is widely used in research, semiconductor, advanced manufacturing, biomedical, optics and communications industries. The piezo-driven stage requires no lubrication, is vacuum-compatible, has both stepping and scanning modes, and achieves sub-nanometer resolution positioning over a macroscopic travel range.
Product Features
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Technical Specifications
| Model | EPSK3020A | EPSK3030A | EPSK3040A | EPSK4025A |
|---|---|---|---|---|
| Dimensions (L×W×H) | 33.2×30.0x11.5（mm） | 43.2×30.0x11.5（mm） | 53.2×30.0x11.5（mm） | 43.2×40.0x15.0（mm） |
| Tabletop Flatness | 10（um） | 10（um） | 10（um） | 10（um） |
| Total Mass | 33（g） | 45（g） | 60（g） | 72（g） |
| Body Material | Aluminum Alloy | Aluminum Alloy | Aluminum Alloy | Aluminum Alloy |
| Drive | PZT Piezo Ceramic | PZT Piezo Ceramic | PZT Piezo Ceramic | PZT Piezo Ceramic |
| Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire |
| Motion Range | ±10mm | ±15mm | ±20mm | ±12.5mm |
| Max Speed | 2~3mm/s | 2~3mm/s | 2~3mm/s | 2~3mm/s |
| Fine Stepping | 1nm | 1nm | 1nm | 1nm |
| Fine Adjustment Range | 2500nm | 2500nm | 2500nm | 2500nm |
| Repeat Positioning Accuracy | ±150 nm (typical), high-precision ±50 nm | ±150 nm (typical), high-precision ±50 nm | ±150 nm (typical), high-precision ±50 nm | ±150 nm (typical), high-precision ±50 nm |
| Sensor Resolution | 1, 4, 20, 100, 500, 1000nm | 1, 4, 20, 100, 500, 1000nm | 1, 4, 20, 100, 500, 1000nm | 1, 4, 20, 100, 500, 1000nm |
| Position Sensor | Grating | Grating | Grating | Grating |
| Mounting Orientation | Horizontal Mount | Horizontal Mount | Horizontal Mount | Horizontal Mount |
| Load in Vertical Motion Direction | 20N | 20N | 20N | 20N |
| Load along Motion Direction | 2N | 2N | 2N | 2N |
| Operating Temperature | -20~80℃ | -20~80℃ | -20~80℃ | -20~80℃ |
| Operating Humidity | Relative humidity 40-60% | Relative humidity 40-60% | Relative humidity 40-60% | Relative humidity 40-60% |
| Vacuum Compatibility | Vacuum version available | Vacuum version available | Vacuum version available | Vacuum version available |
| Control Type | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop |
| Max Drive Voltage | 80V | 80V | 80V | 80V |
| Mounting Requirements | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm |
