Linear Piezo Stage EPSN100L
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Product Introduction
The linear piezo stage uses piezoelectric ceramics as the actuating element, achieving a minimum step size at the sub-nanometer level over a range of hundreds of millimeters — solving the problem of traditional nano stages’ short travel and micrometer motorized stages’ lower precision. Widely used in research, semiconductor, advanced manufacturing, biomedical, optics and communications industries. The piezo-driven stage requires no lubrication, is vacuum-compatible, has both stepping and scanning modes, and achieves sub-nanometer resolution positioning.
Product Features
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Technical Specifications
| Model | Dimensions (L×W×H) | Tabletop Flatness | Total Mass | Body Material | Drive | Wire | Motion Range | Repeat Positioning Accuracy | Sensor Resolution | Position Sensor | Mounting Orientation | Load in Vertical Motion Direction | Load along Motion Direction | Operating Temperature | Operating Humidity | Vacuum Compatibility | Control Type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| EPSN100L | 34.5×31.0x21.4（mm） | 10（um） | 45（g） | Aluminum Alloy | PZT Piezo Ceramic | Shielded Cable, Copper Wire | 100 um | 50 nm (typical) | 1, 4, 20nm | Grating | Horizontal Mount | 5N | 2N | -20~80℃ | Relative humidity 60% | Vacuum version available | Open-Loop / Closed-Loop |
