Linear Piezo Stage EPSM100A
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Product Introduction
The linear piezo stage uses piezoelectric ceramics as the actuating element, achieving a minimum step size at the sub-nanometer level over a range of hundreds of millimeters — solving the problem of traditional nano stages’ short travel and micrometer motorized stages’ lower precision. Widely used in research, semiconductor, advanced manufacturing, biomedical, optics and communications industries. The piezo-driven stage requires no lubrication, is vacuum-compatible, has both stepping and scanning modes, and achieves sub-nanometer resolution positioning.
Product Features
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Technical Specifications
| Model | Dimensions (L×W×H) | Tabletop Flatness | Total Mass | Body Material | Drive | Wire | X-Axis Travel | Y-Axis Travel | Max Speed | Fine Stepping | Fine Adjustment Range | Repeat Positioning Accuracy | Sensor Resolution | Position Sensor | Mounting Orientation | Load in Vertical Motion Direction | Load along Motion Direction | Operating Temperature | Operating Humidity | Vacuum Compatibility | Control Type | Max Drive Voltage | Mounting Requirements |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| EPSM100A | 138.0×138.0x32.0（mm） | 10（um） | 1100（g） | Aluminum Alloy | PZT Piezo Ceramic | Shielded Cable, Copper Wire | ±50mm | ±50mm | 2mm/s | 1nm | 2500nm | ±200 nm (typical), high-precision ±75 nm | 1, 4, 20, 100, 500, 1000nm | Grating | Horizontal Mount | 40N | 2N | 0~60℃ | At 40 °C, relative humidity 60% (non-condensing) | Vacuum version available | Open-Loop / Closed-Loop | 80V | Mounting Face Flatness 0.01 mm |
