Nano Piezo Rotation Stage OMZF Series
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Product Introduction
The nano piezo rotation stage uses piezoelectric ceramics as the actuating element, achieving a minimum step size at the sub-nanometer level — solving the problem of traditional nano stages’ short travel and micrometer motorized stages’ lower precision. Widely used in research, semiconductor, advanced manufacturing, biomedical, optics and communications industries. The piezo-driven rotation stage requires no lubrication, is vacuum-compatible, has both stepping and scanning modes, and achieves sub-nanometer resolution positioning.
Product Features
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Technical Specifications
| Model | OMZF33A | OMZF5950A | OMZF8382A |
|---|---|---|---|
| Dimensions (L×W×H) | 33.0×33.0x16.0（mm） | 59.0×59.0x25.8（mm） | 83.0×83.0x28.5（mm） |
| Tabletop Flatness | 10（um） | 10（um） | 10（um） |
| Total Mass | 70（g） | 230（g） | 540（g） |
| Body Material | Stainless Steel | Aluminum Alloy | Aluminum Alloy |
| Drive | PZT Piezo Ceramic | PZT Piezo Ceramic | PZT Piezo Ceramic |
| Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire | Shielded Cable, Copper Wire |
| Motion Range | 360° | 360° | 360° |
| Swing Diameter | 33mm | 55mm | 82mm |
| Motion Step | 1m° | 1m° | 1m° |
| Min Speed | 0.25°/s | 0.25°/s | 0.25°/s |
| Max Speed | 10°/s | 8°/s | 6°/s |
| Fine Stepping | 0.05m° | 0.05m° | 0.05m° |
| Fine Adjustment Range | 7m° | 7m° | 7m° |
| Repeat Positioning Accuracy | 6m° | 6m° | 6m° |
| Sensor Resolution | 0.05, 0.1, 0.25, 0.5m° | 0.05, 0.1, 0.25, 0.5m° | 0.05, 0.1, 0.25, 0.5m° |
| Position Sensor | Grating | Grating | Grating |
| Mounting Orientation | Horizontal Mount | Horizontal Mount | Horizontal Mount |
| Load in Vertical Motion Direction | 20N | 20N | 20N |
| Torque | 36N*mm | 72N*mm | 90N*mm |
| Operating Temperature | -20~80℃ | -20~80℃ | -20~80℃ |
| Operating Humidity | Relative humidity 40-60% | Relative humidity 40-60% | Relative humidity 40-60% |
| Vacuum Compatibility | Vacuum version available | Vacuum version available | Vacuum version available |
| Control Type | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop | Open-Loop / Closed-Loop |
| Max Drive Voltage | 80V | 80V | 80V |
| Mounting Requirements | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm | Mounting Face Flatness 0.01 mm |
