Z-Axis Lift Stage OMZH1A
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Product Introduction
The Z-axis lift stage uses piezoelectric ceramics as the actuating element, achieving a minimum step size at the sub-nanometer level — solving the problem of traditional nano stages’ short travel and micrometer motorized stages’ lower precision. Widely used in research, semiconductor, advanced manufacturing, biomedical, optics and communications industries. The piezo-driven lift stage requires no lubrication, is vacuum-compatible, has both stepping and scanning modes, and achieves sub-nanometer resolution positioning.
Product Features
Compact and highly rigid.; Zero-clearance, high-precision flexure-hinge guide system.; Piezo actuator with extremely long service life.; With displacement sensor for closed-loop position and speed control.
Technical Specifications
| Model | Dimensions (L×W×H) | Tabletop Flatness | Total Mass | Body Material | Drive | Wire | Motion Range | Lifting Speed | Repeat Positioning Accuracy | Sensor Resolution | Position Sensor |
|---|---|---|---|---|---|---|---|---|---|---|---|
| OMZH1A | 115.0×70.0x44.0（mm） | 10（um） | 670（g） | Aluminum Alloy | PZT Piezo Ceramic | Shielded Cable, Copper Wire | ±5 mm | 0.5mm/s | ±500 nm (typical) | 1, 4, 20, 100, 500, 1000nm | Grating |
